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Department of Chemistry an Biochemistry, University of California at Santa Cruz
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Department of Chemistry an Biochemistry, University of California at Santa Cruz
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| SAM-Ceramic Bilayer Protective Coatings for Microelectromechanical System (MEMS)This project is a collaboration between our group and Professor J. Cho's group in the Department of Mechanical Engineering, SUNY Binghamton. Professor Sammakia (Mechanical Engineering) and Professor Jones (Chemistry) at SUNY Binghamton are also involved in the project. We grow self-assembled monolayers on silicon wafers. We are trying to grow a top ceramic layer on top of the SAM by low-temperature sol-gel methods. Such bilayer combinations are useful for protecting surfaces such as MEMS mirror arrays. Studies began in the Fall of 2002.
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See references: 1.
Q. Yang, K. Chitre, T. O. Salami,
S. R. J. Oliver, J. Cho, “Characterization of Strain-Tolerant
Ceramic/SAM Bilayer Coatings”, in Mechanical Properties of
Nanostructured Materials and Nanocomposites, Materials Research
Society 2003 Fall Meeting Proceedings, Boston, MA, 2004, 791,
pp. 105-110. 2.
Q. Yang, K. Chitre, T. O. Salami,
S. R. J. Oliver, J. Cho, “Development of Protective Coatings for
Silicon Devices”, in Proceedings of the IMECE (ASME International
Mechanical Engineering Congress and Exposition), Washington, D.C., 2003,
2, Paper No. IMECE2003-41700.
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